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A05 BEOL-Compatible 3D Reconfigurable Logic

Reconfigurable devices that can change their polarity between n-type and p-type during run-time show great promises for increasing the complexity of integrated circuits beyond the possibilities of traditional scaling. Since RFETs are based on Schottky-barriers the lower crystal quality of the BEOL-compatible channels is expected to have less impact on the characteristics compared to other logic devices, making them an inherently beneficial device for monolithic BEOL integration. So far, both groups in Dresden and Aachen did groundbreaking work on nanoscale Schottky-barrier FETs and specifically RFETs. On this basis the role of this project will be to go one step further and explore the third dimension while state-of-the-art devices are still bound to the FEOL integration. From Phase 2 onward the co-design with memory elements will be explored.