C01 3D Architecture Schemes and Processes
This project has a scientific and an organizational task which are both essential for the TRR. Scientifically, new contacting, wiring, local interconnection and integration schemes will be explored. An important aspect will be the research on novel atomic layer deposition and atomic layer etching processes that are not existing currently but will be required by projects in Research Area A. The non-programmable wiring schemes which will be strongly diverging from the state of the art in terms of materials and process integration, need to be in the focus of this project. The organizational task of the project is to connect the cleanroom infrastructures at three different sites and at least six different labs (RWTH Aachen cleanroom ZMNT, AMO, FZJ cleanroom, MPI-MSP, TUD cleanroom, NaMLab) is another important aspect and standardized sample formats, run-sheets, lithography marks etc. need to be defined and rolled out to the different labs in order to enable a seamless sample flow. For those important tasks of connecting the cleanrooms and streamlining the data exchange, which will also enhance the possibilities of researchers at the sites for further research activities, both universities TUD and RWTH Aachen confirmed to contribute one Postdoc position each to support Active-3D and to strengthen the collaborative work further. In the first phase of the TRR Project C01 will also closely follow the literature on heat distribution layers evaluate their necessity and the way forward. This could result in an own Research Area A project in Phase 2 or an important aspect of Phase 2 of the C01 project.
